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In this paper, the tribological behaviors of 1 μm of tetrahedral amorphous carbon (ta-C) coatings deposited with a different substrate bias of -0 V, -100 V and -300 V are examined under elevated temperature up to 600°C. It is found that wear behavior could be divided into two distinct regions according to testing temperature. The variation trend of the specific wear rate of ta-C coatings in region I at 23, 100 and 200°C are affected by abrasive particles which coincide with sp content of ta-C coatings. In region II at 300, 400 and 500°C, the transfer layer play a major role in reduction of wear rate as a function of substrate bias.

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Effect of Substrate Bias and Temperature on Friction and Wear Properties for ta-C Coating Prepared under Different Substrate Bias Voltages with Filtered Cathodic Vacuum Arc Deposition