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Titanium nitride (TiN) thin films with the thickness of 0.1, 0.2, 0.5, 1.0, 2.0 and 4.0μm were coated on a carbon steel substrate by the ion beam mixing method. The film had a strong fiber texture with ‹001› axis perpendicular to the film surface. The distribution of the residual stress in thin films was measured by the grazing incidence X-ray diffraction (GIXD) and the scattering vector (SV) methods. The in-plane stress measurement by GIXD was applicable to the thickness down to 0.2μm of TiN films. The stress was a compression of around 2 to 3GPa. The compressive stress was found to increase in the very-near surface region of 20 to 30nm in depth. Thinner films had a steeper increase of the compressive stress in the very-near surface region. The strain distribution measured by the SV method using Cr-Kα radiation was nearly constant over the region of the penetration depth between 0.3 and 0.6μm from the surface, and that by using synchrotron X-rays was also constant over the penetration depth from 0.4 to 1μm. The stress distributions measured by the in-plane measurement and the one-tilt method combined with the surface removal method showed a good agreement with each other. The compressive residual stress was uniform within thin films except very near the surface of about 20 to 30nm in depth.

Residual Stress Distribution in TiN Thin Films with Fiber Texture Measured by Grazing Incidence and Scattering Vector X-Ray Methods