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Reproduction techniques, like an injection molding or micro-powder injection metallurgy or embossing, are one of the methods which provide microstructures of wide variety of materials and of the production method as a application of LIGA process. Metals and ceramics become of increasing importance to microsystem technology in terms of mechanical properties and physical functions. In this study, we develop a new process using LIGA mold which is able to cast a microstructure of alloys or ceramics using Spark Plasma Sintering (SPS) machine. In addition, the powder of alloys is made by mechanical alloying (MA) method. In this report, a spring structure of Ti-Ni-Cu shape memory alloy was produced by way of trial. As the results, it was found this LIGA-MA-SPS process became effective technique.

Application of MA-SPS Method for Fabrication of Microstructures Using LIGA Process