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Multifunctional materials exhibiting both variable permittivity under electric field and large piezoelectric coefficients can be used in microelectronic applications for energy efficiency as an active impedance matching as well as for vibration energy harvesting. We propose here the exploration of the ternary phase diagram BaTiO3-BaZrO3-CaTiO3 (BCTZ) through the (piezo) electrical characterization of thousands of thin film capacitors deposited using combinatorial pulsed laser deposition (CPLD).

Multifunctional tunable and piezoelectric Ba1-xCaxTi1-yZryO3 thin film capacitors