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Synopsis : In order to improve the biocompatibility of function-shared titanium-base alloy, coatings of pure titanium on the TiNi shape memory alloy and Ti-6A1-4V alloy were investigated. DC source was superior to RF source in characteristics of sputtered film and the rate of deposition. After cleaning method was examined, the sputtering conditions dependence of the thickness of sputtered film was investigated on DC sputter deposition. The sputtered titanium accumulated on substrate proportionally to electric power and showed orientation highly depended on the heating temperature of substrate. Complete denture bases of Ti-6A1-4V deformed by superplastic forming were well coated with pure titanium by DC sputtering in Ar gas atmosphere.

Sputter Deposition of Pure Titanium onto Complete Denture Base of Ti-6A1-4V Deformed by Superplastic Forming