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Plasma nitriding is widely used for treating various engineering materials to achieve increased surface hardness while maintaining the core properties of the material. Nitridation increases the wear, fatigue, and corrosion resistance, as well as the surface hardness, of a material. At present, glow discharge plasma nitriding is the most common plasma nitriding method;1–5) however, this requires a vacuum system to generate plasma. Therefore, most traditional plasma nitriding methods can only be performed as a batch process, leading to a high cost of capital.6) For this reason, we are developing a new plasma nitriding method that is conducted under atmospheric pressure, as previously reported.7) One of the biggest problems with plasma nitriding under atmospheric pressure is oxidation. Due to the high treatment temperature of the sample, oxidation occurs from the oxygen in the air. In conventional plasma nitriding, the sample is not oxidized because the process is conducted in a vacuum. In samples that form an oxidized film, nitrogen is not diffused into the sample;8,9) therefore, preventing oxygen from getting into the treatment zone is crucial.10) The conventional DC glow discharge plasma method enables surface hardening to remove Effect of Oxidation on Surface Properties of AISI H13 Tool Steel Nitrided by Atmospheric-Pressure Plasma