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A variety of steel products are utilized as structural materials for e.g. automotive and architectural applications, and chemical plants, and the mechanical properties of these steels are known to be strongly affected by small amounts of light elements, such as hydrogen, carbon, and nitrogen. These elements fundamentally occupy interstitial sites in the crystal structure and are distributed in the microstructure of the steels. It is of great importance to establish methods for analyzing the distribution of these elements in the microstructure of steels, in order to understand influences of these elements on the mechanical properties, which are strongly influenced by the microstructure formed during phase transformations and plastic deformation. The distribution of light elements and alloying elements has not been fully clarified in commercial steel products or iron-based alloys, although many kinds of alloying elements in steel products influence the formation of the microstructure.1) Among the light elements, it is known that the diffusivity of hydrogen in steels is high, while its solubility is very low.2,3) Hydrogen embrittlement often occurs in highstrength steels, including stainless steels, but the mechanism Micro-Portion Image Analysis of Light Elements in Fe–Cr Based Alloys by Time-of-Flight Secondary Ion Mass Spectrometry