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The unique solution to the stress reduction of Ge 2 Sb 2 Te 5 phase-change material has been known to cap a layer with an inherently huge compressive stress. In this paper, another approach to the stress reduction is firstly presented in view of the compositional change of Ge 2 Sb 2 Te 5 , particularly due to oxygen diffusion. During thermal cycles, we measured the radius changes using four kinds of samples and calculated their stress-changes using Stoney equation. In case of basic specimen, more oxygen in Ge 2 Sb 2 Te 5 and larger stress-change are observed as cycling temperature increases. In the rest of samples, the stress-change is reduced compared with the basic one, only when a capping layer on Ge 2 Sb 2 Te 5 blocks the oxygen penetration effectively. The stress increase by the oxygen diffusion is considered to be due to the lattice distortion of Ge 2 Sb 2 Te 5 .

Stress Reduction of Ge<SUB>2</SUB>Sb<SUB>2</SUB>Te<SUB>5</SUB> by Inhibiting Oxygen Diffusion