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Transmission electron microscopy (TEM) analyses of the defects formed in epitaxial SrRuO 3 films on SrTiO 3 (001) substrates are reported. With preparing three different forms of TEM specimens, i.e. plan-view, cross-sectional and free-standing specimens, various TEM techniques were implemented with placing emphasis on the effect of misfit strain on the defect formation. With in-situ TEM heating observations, the present TEM results provide insights into the formation mechanism of misfit dislocations, the occurrence of anti-phase boundary ribbons near the misfit dislocations, and the structural phase transitions of epitaxial perovskite films.

Defects in Strained Epitaxial SrRuO<SUB>3</SUB> Films on SrTiO<SUB>3</SUB> Substrates