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Imaging of surface atoms with simultaneous measurement of noncontact atomic force microscopy (NC-AFM) and scanning tunneling microscopy (STM) is performed. Si cantilever coated with PtIr provides stable AFM/STM operations to obtain high spatial resolution images. AFM/STM measurements on Si(111)-(7×7), Ge(111)-c(2×8), and TiO 2 (110) surfaces are presented at room temperature. On the Ge(111)-c(2x8) surface, adatom and restatom sites which have the same atomic patterns are determined from dual bias AFM/STM measurements.

Simultaneous Atomic Imaging of Atomic Force Microscopy and Scanning Tunneling Microscopy Using Metal Coated Cantilevers