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Power and Industrial Division, Hitachi Ltd., Hitachi 319-1221, Japan Graduate School of Science and Engineering, Ibaraki University, Hitachi 316-8511, Japan Institute of Applied Beam Science, Graduate School of Science and Engineering/Frontier Research Center for Applied Atomic Sciences, Ibaraki University, Hitachi 316-8511, Japan Department of Materials Science, Faculty of Engineering, Ibaraki University, Hitachi 316-8511, Japan

Effect of Texture and Grain Size on the Deformation Behavior of Sputtered Thick Al-Si Films during Cyclic Heating and Cooling