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The solubility of nitrogen in liquid silicon equilibrated with silicon nitride and its dependence on the composition of the atmosphere has been studied in the temperature region 1428-1542°C. High purity silicon was melted in silicon nitride crucibles under Ar and N 2 atmospheres. The equilibrium was observed to be established within minutes, after which no evolution of the nitrogen content with time could be observed. The nitrogen transfer between the Si 3 N 4 -crucible and the melt was faster than the transfer via the gas-phase to such an extent that the composition of the atmosphere did not influence the solubility limit. The solubility limit as a function of temperature was found to follow: C N (T, C B ) = 7957.9 * exp(-24376/T) At the melting point of silicon, this equation gives the solubility of nitrogen as 42 ppm mass. From this equation, a thermodynamic derivation led to the following expression for the dissolution energy of nitrogen: ΔG 0 = -1.63 * 10 4 + 26T.

Temperature Dependence of the Solubility of Nitrogen in Liquid Silicon Equilibrated with Silicon Nitride