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Low-energy characteristic X-ray emission is detected during bombardment of positive low energy ions onto insulator materials. The phenomenon is considered to be related to surface charge-up. To study further the mechanism, the characteristic X-rays was studied during 30keV Ga + ions bombardment onto Al 2 O 3 monocrystalline specimens applied with a direct current (DC) bias in the present work. The applied DC voltage builds an electric field parallel to the surface of the specimen. The results show that the characteristic X-rays of O-Kα and Al-Ka increased with the increasing of the applied DC voltages.

materials transactions

Relationship between X-ray Intensity and Electric Bias on Al&lt;SUB&gt;2&lt;/SUB&gt;O&lt;SUB&gt;3&lt;/SUB&gt; Surface during Low Energy Ga&lt;SUP&gt;+&lt;/SUP&gt; Irradiation