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Single nano-particle impacts in the aerosol deposition (AD) method were simulated by the molecular dynamics calculation. By changing the incident speed, angle, and the crystal orientation of the aerosol particle, structural variation in the particle and the substrate was examined. It was found that the structural changes of the particle by the impact are classified into three cases. The particle maintains the original structure when the incident speed is low. If the incident speed is intermediate and if the particle is properly oriented, the particle was divided into a few grains. If the speed is high enough, the atomistic structure of the particle is composed of a disordered phase and small crystal regions.

Molecular Dynamics Simulation on the Single Particle Impacts in the Aerosol Deposition Process