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Au/ SiO 2 nano-composite thin films with 3 to 65 vol% Au were prepared by induction-coil-coupled plasma sputtering, and the effect of heat-treatment on the nano-structure and optical property of the films were investigated. The mean diameter of the Au particles in the as-deposited films was about 8 nm and increased from 10 to 30 nm after the heat treatments at 900C. The optical absorption was greatly improved by the heat-treatment due to the increase of Au particle sizes. At the heat-treatment of 900 Cw Au/SiO 2 films containing 3 to 65 vol% Au showed absorption peaks at the wavelength of 540 to 560 nm, while no absorption peak was observed in the as-deposited films containing more than 12 vol% Au. The intensity of the absorption peak for the Au/SO 2 films heat treated at 900 C increased with increasing Au content, showing a maximum value around the Au content of 37 vol%.

Optical Properties of Au/SiO<SUB>2</SUB> Nano-Composite Films Prepared by Induction-Coil-Coupled Plasma Sputtering