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Micro-dies with five steps were fabricated by machining with the focused ion beam (FIB) process using two types of WC‐10%Co cemented carbide with a WC grain size of 5 µm and 0.5 µm. The surface roughness of the dies was investigated by atomic force microscopy (AFM). In the coarse-grained cemented carbide, the surfaces of the WC phase were very smooth. However, those of the Co phase were rough, particularly near the interface. In the fine-grained cemented carbide, the surfaces were smoother on the whole and the irregularities of roughness were smaller compared with the coarse-grained cemented carbide, but some voids of about 0.5 µm, almost the same size as the WC grain, were observed.

Effects of the WC Grain Size on the Surface Roughness of WC-10%Co Cemented Carbide Micro-Die Machined by FIB