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Microtribology of silicon single crystals is one of the important factors for the practical use of microelectromechanical system (MEMs). In this study, the effect of crystal orientation on microwear of silicon single crystal and the wear structure were investigated. Microfriction experiments using atomic force/friction force microscope (AFM/FFM) were carried out to investigate the effect of crystal orientation on the microwear depth of silicon single crystals. In these experiments, the scanning directions of a tip of AFM/FFM were〈100〉and〈110〉on Si(100) surface and〈112〉on Si(111) surface. Diamond and Si3N4 tips were used to generate the normal force of 200 and 5 mm, respectively. It was found that the depth of the wear traces generated on silicon surfaces increased in the following order:〈112〉,〈100〉,〈110〉. Crosssectional TEM observations of the microwear traces were carried out. It was found that small dislocation loops and lattice defects were generated in the surface region at the first stage of the microwear, and the size and the number of dislocations increased with the progress of the microwear.

Microwear Properties of Silicon Single Crystal and the Wear Structure