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Investigation of Characteristics and Pretreatment Method of High Purity Silicon Sludge Filtrated from Wastewater of Silicon Industry (Reuse Technology of High Purity Silicon Sludge―Part I) Hakaru Nakato1, Minoru Nitta1, Ryoji Uchimura1, Hirohumi Iinuma2 and Hiroshi Uesugi2 1Process & Products Engineering Division, KAWASAKI STEEL Technoresearch Corporation, Chiba 2600835 2SANYO Aqua Technology Co., Ltd., Oizumi, Gunma 3700596

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Investigation of Characteristics and Pretreatment Method of High Purity Silicon Sludge Filtrated from Wastewater of Silicon Industry(Reuse Technology of High Purity Silicon Sludge&amp;mdash;Part I)