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The ratio of surface area to volume increases as a material gets smaller. For this reason, the mechanical properties of a micro-sized material are strongly influenced by the surface conditions. To accurately study how the mechanical properties are influenced by the size, we need to test specimens with negligible work-affected layers. However, conventional microfabrication methods are poorly suited for the manufacture of specimens that meet this condition. In order to overcome these problems, we developed a novel method for manufacturing micro-sized tensile specimens with negligible work-affected layers using a precision electrolytic polishing apparatus. A polycrystalline austenitic stainless steel (SUS304) wire with a diameter of 0.5 mm was selected as the material for study. The sample wire (anode) was vertically set at the center of a ring-shaped counter electrode and gripped by a collet chuck. Once the sample was set, a rectangular wave voltage for electrolytic polishing was applied in a flowing electrolytic solution. The apparatus was used to manufacture a tensile specimen with a diameter of 51 μm, i.e., a diameter smaller than the average grain size of the sample. Optical, laser, and scanning electron microscope observations revealed a smooth and mirrored specimen surface. Tensile testing of the specimen by a testing machine for micro-sized materials revealed a clear yield point on a stress-displacement curve. The yield and fracture strength of the specimen were 100 and 180 MPa, respectively, or about the same as those of a single crystal. The specimen deformation observed by scanning electron microscope mainly occurred at single crystal regions placed between grain boundaries.

Fabrication Method of the Micro-Sized Tensile Specimen for Inspecting Size Effects by Electrolytic Polishing Technique