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Polycrystalline Pb(Zr0.52Ti0.48 )O3 (PZT) microtubes are fabricated by a  vacuum infiltration method. The method is based on repeated infiltration of  precursor solution into macroporous silicon (Si) templates at a  sub-atmospheric pressure. The pyrolyzed PZT tubes of a 2-μm outer diameter,  extending to over 30 μm in length were released from the template using a  selective isotropic-pulsed XeF2 reactive ion etching of silicon.  Free-standing microtubes, partially anchored at the bottom of the Si  template, were then crystallized in pure oxygen atmosphere at 750 °C for 2  min using a rapid thermal annealer. The perovskite phase of the final PZT  tubes was confirmed by X-ray diffraction (XRD) analysis. The XRD spectrum  also revealed a small amount of the pyrochlore phase in the structure and  signs of possible fluoride contamination caused most likely by the XeF2  etching process. The surface morphology was examined using scanning electron  microscopy. It was demonstrated that the whole surface of the pore walls was  conformally coated during the repeated infiltration of templates, resulting  in straight tubes with closed tips formed on the opposite ends as replicas of  the pore bottoms. These high aspect ratio ferroelectric structures are  suggested as building units for developing miniaturized electronic devices,  such as memory storage (DRAM trenched) capacitors, piezoelectric scanners and  actuators, and are of fundamental value for the theory of ferroelectricity in  systems with low dimensionality.

High aspect ratio lead zirconate titanate tube structures: I. Template assisted fabrication - vacuum infiltration method