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The inner tracking system of the CMS experiment, which comprises SiliconPixel and Silicon Strip detectors, is designed to provide a precise measurementof the momentum of charged particles and to reconstruct the primary andsecondary vertices. The movements of the different substructures of the trackerdetectors driven by the operating conditions during data taking, require toregularly update the detector geometry in order to accurately describe theposition, orientation, and curvature of the tracker modules. The procedure inwhich new parameters of the tracker geometry are determined is known asalignment of the tracker. The alignment procedure is performed several timesduring data taking using reconstructed tracks from collisions and cosmic raysdata, and later on, further refined after the data taking period is finished.The tracker alignment performance corresponding to the ultimate accuracy of thealignment calibration for the legacy reprocessing of the CMS Run 2 data ispresented. The data-driven methods used to derive the alignment parameters andthe set of validations that monitor the performance of physics observablesafter the alignment are reviewed. Finally, the prospects for the alignmentcalibration during the upcoming run of the LHC, where more challengingoperation conditions are expected, will be addressed.

CMS Tracker Alignment: Legacy results from LHC Run 2 and Run 3 prospects