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The importance of synthetical optimization design for micro-components is continuously increasing with the development of MEMS, we present a new solution for synthetical optimization design by combining virtual prototype (VP), finite element method (FEM), rough set theory (RST), regression analysis (RA) and genetic algorithms (GA) in this paper. The VP and the FEM are used to design and analyze dynamic properties of coupled-energy-domain of abundant instances to obtain the data of variable, and the RST and the GA are used to confirm the variable number and restriction condition in synthetical optimization model; the RA and GA are adopted to establish the synthetical optimization model and obtain the optimal results. Meanwhile, the corresponding prototype system software of synthetical optimization design for micro-components is developed and applied to the synthetical optimization design of thermal actuated micro-pump to demonstrate the above new approach and prototype tools.

Research of Synthetical Optimization Design System of Micro-components Based on RST and GA