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Представлены теоретические основы и результаты моделирования процесса формирования островковых тонких пленок в вакууме. Рассмотрены возможные группы методов получения островковых тонких пленок. Показаны зависимости латеральных размеров островковых тонких пленок в вакууме от технологических параметров нанесения. Theoretical foundations and results of the modeling of islet formation of thin films in vacuum are presented. The possible groups of methods for islet thin films are considered. The dependence of thin films lateral islet sizes on the technological parameters of deposition in vacuum is shown.

Modeling of process of formation of islet thin films