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The tribological properties of ZnO thin film coated on an aluminium work piece by RF magnetron sputtering were studied as a function of deposition power, substrate coating temperature, heat treatment and rotation speed. The variation in the coefficient of friction of ZnO films produced under various levels of coating parameters and conditions were experimentally determined using a pin-on-disk tribometer. The results showed that with change in deposition conditions and heat treatment, there are significant microstructural changes in ZnO films, which affect the coefficient of friction. The hardness of the prepared films was also tested using a Vickers Hardness testing machine. There was a consistent and considerable decrease in the friction coefficient of the aluminium working piece after ZnO coating. It is found that the ZnO can be used as a low friction coating material for components working under oxidative and high temperature environments.

Tribological Behaviour of Sputter Coated ZnO Thin Films