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Ultrashort-pulsed lasers have been attracting worldwide interest in science and engineering. Studying the ther- mal deformation induced by ultrashort-pulsed lasers is important for preventing thermal damage. This article presents a new numerical method for studying thermal deformation in 3D double-layered film micro-structures exposed to ultras- hort-pulsed lasers. The method is demonstrated by investigating thermal deformations in a 3D double-layered thin film and a 3D double-layered sphere, respectively.

A Finite Difference Method for Studying Thermal Deformation in 3D Double-Layered Micro-Structures Exposed to Ultrashort-Pulsed Lasers