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Development of Extreme Ultraviolet and Soft X-Ray Multilayer Optics for Scientic Studies with Femtosecond/Attosecond Sorces by Andrew Lee Aquila B.S. (University of California, Berkeley) 2004 A dissertation submitted in partial satisfaction of the requirements for the degree of Doctor of Philosophy in Engineering Science–Applied Science and Technology in the GRADUATE DIVISION of the UNIVERSITY OF CALIFORNIA, BERKELEY Committee in charge: Professor David Attwood, Chair Professor Roger Falcone Professor Stephen R. Leone Spring 2009

Development of extreme ultraviolet and soft x-ray multilayer optics for scientific studies with femtosecond/attosecond sources