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Integrated microsystems provide the benefits of small size, low power consumption, robustness, and potentially inexpensive manufacture. However, multifunctional advanced microsystems often require a combination of microelectronic and photonic technologies, For example, high-density 2-dimensional integrated optoelectronic arrays are the basic components necessary to construct real-time electro-optical signal processing and analog information processing microsystems. In corresponding *no longer at Sandia **L&M Technologies, Inc.

Final Report on LDRD Project: Heterogeneous Integration of Optoelectronic Arrays and Microelectronics