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The implementation of an auto focus algorithm is an important and crucial feature for infrared microscopy. To detect focus images, the entire infrared camera has to be moved due to the fact that a microscope camera system employs a fixed lens. In our work, we present the concept of a real time auto focus algorithm especially for infrared imaging of power semiconductor chips. Three auto focus functions are implemented and compared: the gradient operator, the Sobel edge detection and the 2D Fast Fourier Transformation (FFT). The main goal is to identify the function which can robustly detect the focus image on varying temperatures and at changing intensities.

Implementation of real time auto focus methods for static and dynamic infrared imaging of power semiconductor chips