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PRTCVD (pulsed rapid thermal chemical vapor deposition) method has been introduced to prepare zirconium titanate (ZrTiO4) films from a multi-layered structure composed of ZrO2 and TiO2 as a primitive oxide, which allows for the preparation of a given film with different element per cycle and precise control over the thickness of the film. The feasibility of PRTCVD was evaluated and it was confirmed that a multilayered structure composed of different primitive oxides can be easily produced by PRTCVD and transformed into a multi-component single phase oxide such as zirconium titanate by an appropriate thermal annealing process.

FORMATION OF ZIRCONIUM TITANATE FROM MULTI-LAYERED STRUCTURE OF ZrO2 AND TiO2 DEPOSITED BY PULSED RAPID THERMAL CHEMICAL VAPOUR DEPOSITION