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The main aim of this paper is to create nanoporouse aluminium oxide membrane which could be used as vibroactive nanofilter in biomedical micro hydraulic devices. This research paper covers the experimental setup of nanoporouse aluminium oxide membrane fabrication and the investigations of its chemical and surface properties. A custom-made anodization experimental setup was used to form membrane with hexagonal pores of 70 nm diameter and 110 nm interpore distance.

Nanoporous aluminum oxide membranes for biomedical micro hydraulic devices