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A three-DOF ultrasonic motor is presented in this paper. The proposed motor consists of four piezoelectric ceramic plates and a mental base with a flange that can fix the motor on a rack. The proposed motor takes advantage of a longitudinal mode and two bending modes, different hybrids of which can realize three-DOF actuation. Because of symmetric structure of the proposed motor, the resonance frequencies of the two bending modes are identical. And the resonance frequency of the longitudinal mode was tuned closed to the ones of the bending modes by adjusting the structural parameters in modal analysis. Then trajectories of nodes on the driving foot were obtained by the transient analysis to verify the feasibility of driving principle. Experiments including vibration shape test and output characteristic test were executed. The starting voltages of the rotation along horizontal axes are about 10 Vp-p. Under driving voltages of 200 Vp-p, the output velocities of three DOF can reach 280 rpm, 277 rpm and 327 rpm, respectively. The results of the experiments indicate that the proposed motor is characterized by low starting voltages and high output velocities.

A three-DOF ultrasonic motor using four piezoelectric ceramic plates in bonded-type structure