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Industry enterprises are regarded as the research object in this article, and the three-stage DEA based on super-SBM is used to calculate the green innovation efficiency of China’s 29 provinces, municipalities and autonomous regions from 2010 to 2015. The results show that the green innovation efficiency of China’s hightech industry is increasing year by year, but the overall level is not high. Government support for environmental protection efforts, the level of economic development and industrial structure have a positive role in promoting the innovation efficiency, but regional energy resources production has negative impact. There are obvious differences in the efficiency among different provinces, which shows the law of decreasing of eastern, central and western regions. Low innovation output and environmental pollution are the main problem some regions of low efficiency need to break through.

Research on Green Innovation Efficiency by Using Three-stage DEA Based on Super-SBM System