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ZnO thin films were prepared by RF reactive magnetron sputtering on phynox substrate at room temperature for four different thicknesses by varying deposition duration. The structural and morphological properties and composition of these films were characterized using XRD, SEM, and EDS, respectively. Suitability of these films for dynamic pressure sensing applications and the effect of film thickness on dynamic pressure sensing were evaluated experimentally using a shock tube equipment. Shock tube test results show the pure dynamic behavior of ZnO films with fast rise and discharge. Sensors with higher film thickness showed improved sensitivity which is on par with commercially available dynamic pressure sensors. This work demonstrates that the cost-effective sensors based on ZnO thin film are capable of sensing dynamic pressures for different pressure ranges.

Study on the suitability of ZnO thin film for dynamic pressure sensing application