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The paper describes the acquisition, establishment of mechanisms and patterns of formation of the phase composition and structure of multilayer coatings of the (TiAlСrY)N/ZrN system with a single and of the (TiAlCrY/Zr)/(TiAlСrY)N/ZrN systems with a double modulation period by vacuum-arc deposition. The targets were located along one straight line at equal distances from the perpendicular axis on which the substrates were placed. The rotation of the axis with the substrates was carried out either continuously or with a fixed delay at the evaporators. The coatings of both systems are distinguished by a high degree of laminarity of the layers. The (TiAlСrY)N/ZrN system coatings have a pronounced layered periodic structure in the entire coating volume. The modulation period (total thickness of the bilayer) of such a structure is about 30 nm. Two modulation periods are clearly visible in the (TiAlCrY/Zr)/(TiAlCrYN/ZrN) system coatings. One period approximately coincides with the modulation period of the samples of the (TiAlCrY/Zr)N system and is about 30 nm. The second modulation period is about 1.3 microns. It includes 48 bilayers. The influence of the partial pressure of nitrogen in the chamber on the nitrogen content in the coatings, their hardness and adhesive strength were studied. A significant increase in the hardness of 68.22 GPa and the adhesion strength of the coatings with a double modulation period of the structure was revealed. A fundamentally new technological approach to the process of obtaining multilayer coatings has been proposed.

journal of nano- and electronic physics

Structure and Physicomechanical Properties of Superhard Multicomponent Multilayer (TiAlСrY/Zr)/(TiAlСrYN/ZrN) Coatings with Double Modulation Period of the Structure