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絶縁性試料を走査型電子顕微鏡─エネルギー分散型X線分析で観察するためには観察前に金属や炭素などの導電性の薄膜を真空蒸着あるいはイオンスパッタリングして帯電を防ぐ必要がある試料の準備には時間がかかり煩雑な操作が必要となる本論文ではエレガード®を絶縁性試料上にごく少量スプレーすると帯電防止剤としてマイクロメートルオーダーの空間分解能で走査型電子顕微鏡二次電子像観察及びエネルギー分散型X線分析による組成分析ができることを示したまたエレガード®による金属腐食性についても論じた.SEM-EDX analyses of insulator samples are usually believed to be difficult because of charge-up effect, and thus carbon or gold evaporation was performed prior to the SEM observation. However, such an electric conductive thin film will emit characteristic X-rays, interfering the EDX analysis. In the present study, we report that using an anti-static spray is an easier and more effective way than using an ionic liquid. Possibility of metal corrosion by the anti-static spray should be noted

SEM-EDX Analysis of Insulator Specimen by Using Garment Antistatic Spray