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It was found by chemical-state-discriminated X-ray photoelectron diffraction (XPED) measurements that CaO formed epitaxially on CaF 2 (111) even at room temperature by electron bombardment in the experimental vacuum system (2×10 -8 Torr) with 90% H 2 O. The crystallographic orientation of the CaO epitaxial phase was directly determined from the analysis of XPED patterns

A CHEMICAL-STATE-DISCRIMINATED XPED STUDY ON STRUCTURE OF CaO FORMED BY ELECTRON BOMBARDMENT ON CaF<sub>2</sub> (111)