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Various investigations have focused on the laser-induced damage of thin films. However, substrate surface properties have not been taken into account. TiO 2 thin films with a one-quarter wavelength optical thickness were deposited by electron beam evaporation on two types of substrates with different surface properties. The surface morphologies of TiO 2 thinfilms were captured by atomic force microscopy, and the laser-induced damage threshold of TiO 2 thin films was measured. The relationship between the substrate surface properties and the laser-induced damage properties of TiO 2 thin films was observed and analyzed.

Influence of Substrate Surface Properties on Laser-induced Damage Properties of TiO2 Thin Films