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To study the effect of step edges on the growth of Pt thin films on oxide substrates, Pt films were grown on SrTiO3(100), rutile TiO2(100), and Al2O3(11­20) stepped surfaces at 673 and 973K by pulsed laser deposition. No clear effect due to the step edges on the film growth was found on the SrTiO3 at 673K. However, the Pt grains were larger in size at the step edges than on the terraces at 973K. The estimated length of the Pt surface diffusion was longer than the average terrace width at 973K and shorter at 673K. Similar growth behavior was also observed on the TiO2 at 973K, while there was no clear effect caused by the step edges in the case of the Al2O3. The Pt diffusion length was estimated to be longer than the terrace width on the TiO2 and shorter on the Al2O3. The effect of the step edges can therefore be understood by considering the Pt surface diffusion.

Effect of step edges on the growth of Pt thin films on oxide single-crystal substrates