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La-doped YBCO (Y0.9La0.2Ba1.9Cu3Oy) superconducting films were deposited by an off-axis DC magnetron sputtering method. We investigated the relationship between the film characteristics and the deposition conditions, and drew systematical maps in terms of composition, surface morphology, crystal structure and superconducting properties for the films deposited at various spatial geometries of a substrate and a target. Correspondence between the Cu content and the surface morphology was clearly observed. Cu-rich films had precipitates on the surface. Slightly Cu-poor films exhibited c-axis orientation and a high Tc of 87 K. Among them, the film deposited at a rather fast deposition rate exhibited a flat surface with an average surface roughness Ra less than 1 nm for an area of 10 micron square. Considerably Cu-poor films contained a-axis oriented grains or exhibited very rough surfaces. The cationic ratio of Y:La:Ba did not change significantly.

Characterization of La-doped YBCO superconducting films deposited by DC magnetron sputtering at various off-axis geometries