AI Assistant
Blog
Pricing
Log In
Sign Up
Synthesis of AlN Films by Chemical Vapor Deposition in AlCl<sub>3</sub>⋅NH<sub>3</sub>-H<sub>2</sub> System
Details
Cite
Export
Add to List
The content you want is available to Zendy users.
Already have an account? Click
here.
to sign in.
