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In this work, ZnO (Zinc Oxide) rods, which is a sensitive material for gas detection, are grown on a microcantilever surface by hydrothermal technique. Synthesis of ZnO rods consists of two processes, i.e., a formation of seed layer using Zinc Acetate Dihydrate by a dip-coating and a growth of the ZnO rods using Zinc-Nitrate-Tetrahydrate at a temperature 95°C for time variations of 2 hours, 4 hours and 6 hours. Drying condition for both seed layer and growth of ZnO rods was done at a temperature of 120 C for 2 hours. The ZnO rods were then characterized by Fourier Transform Infrared (FTIR) in order to investigate the formation of Zn-O bond. The characterization results indicate that the metal oxide

INVESTIGASI PEMBENTUKKAN IKATAN Zn-O RODS DI ATAS PERMUKAAN MIKROKANTILEVER DENGAN UJI KARAKTERISASI FTIR