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A laser modification method to control the surface  wettability of a silicon and borosilicate glass substrate is proposed and  demonstrated. The wettability of the silicon surface decreases after 2.5 W  laser irradiation without a change in surface morphology. When the laser  power is greater than 4 W, it results in the formation of a 10-nm-deep  groove and the wettability increases. These phenomena are caused by changes  in the number of surface groups and morphology, respectively. On the other  hand, the glass surface is modified by infrared laser irradiation and the  treated surface is highly hydrophilic. Surface analysis by FT-IR indicates  that the modification is the result of an increase in the number of silanol  groups. The proposed modification method is applied to micro-fluidic  systems. A modified line can function as a surface micro-channel.  Furthermore, with a gradient in wettability, the micro-channel has the  ability to self-transport water droplets.

Laser Modification of Silicon and Borosilicate Glass Wettability for Micro-Fluidic Systems