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We propose a wide-range micro- and nano-positioning sensor based on  an image sensor. The intensity distribution of a Moiré signal is  measured on the image sensor and used for position sensing via Fast Fourier  Transform (FFT) analysis. The FFT returns the frequency spectra and phase  characteristics of the image. The frequencies caused by the beam divergence,  the order of diffraction, and the Moiré signal can then be identified.  The sensor can detect position with high accuracy using the phase shift of  the Moiré signal. The results also demonstrate a measurement range of up  to 6 mm and an estimated standard deviation of 3.3 nm under specified  conditions. Moreover, the target position can be set arbitrarily by  automatic PI control. This positioning sensor is characterized as using only  one sensor to detect position with a high accuracy over a wide measurement  range, making it easy to install in existing industrial machines and tools.  Moreover, the accuracy and the measurement range are selectable by choosing  the appropriate frequency component.

Development of a Wide-Range Precision Positioning Sensor Based on Image Analysis of Diffracted Light