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The purpose of this study is to estimate ablated crater  depth with sufficient numerical accuracy when multi-shot channels of  ultra-short pulsed laser are executed for micro drilling processes on thin  glass plates. In this analytical model, the plasma model, in which the free  electron density and the complex dielectric function of the Lorentz model  are evaluated, is applied to estimate the ablated regions and the regions  damaged by laser ablation when glass is considered to be a dielectric  material. The absorption coefficient and the threshold fluence are important  parameters in the evaluation of the ablated crater depth and ablation rate.  The parameters obtained in this numerical analysis are in agreement with the  experimental results and are computed quantitatively to several laser  irradiation conditions. The experimental results and analysis results are  examined for multi-shot channels. In an experiment involving laser ablation  using multi-shot laser beams, ablation rates for the initial shot are lower  than subsequent ablation rates. The effectiveness of the modified absorption  coefficient and modified threshold fluence for initial shots is confirmed  for the reduction of ablation rate.

Micro Drilling Simulation of Ultra-Short Pulsed Laser Ablation of Glass