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Positioning devices which are composed with linear ball guideways and a  linear motor are increased in recent precision positioning field. However,  it is a difficult problem to achieve precision or ultra-precision  positioning because rolling frictional force of the linear ball guideways is  a disturbance force. Therefore, a frictional compensation is implemented by  a controller. In this paper, one-axis positioning apparatus using a voice  coil motor as an actuator is constructed. Moreover, several control methods  are full-closed loop of measured displacement feed-back, feed-forward  control of reference position and feed-forward control as like inverse  transfer function using nonlinear frictional model proposed by authors. The  equivalent spring constant of the nonlinear frictional model changes by the  displacement. As implementing positioning tests, it is verified that the  feed forward control using the nonlinear frictional model is effective for  achieving the precision positioning.

Precision Positioning Control by Modeling Frictional Behaviors of Linear Ball Guideway