Open AccessDevelopment of a Vibration Suppression GUI Tool Based on Input Preshaping and its Application to Semiconductor Wafer Transfer Robot
Author(s) -
Minh Duc Duong,
Kazuhiko Terashima,
Toshio Kamigaki,
Hirotoshi Kawamura
Publication year - 2008
Publication title -
international journal of automation technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.513
H-Index - 18
eISSN - 1883-8022
pISSN - 1881-7629
DOI - 10.20965/ijat.2008.p0479
Subject(s) - vibration , wafer , robot , semiconductor , transfer (computing) , graphical user interface , interface (matter) , engineering , computer science , mechanical engineering , control engineering , acoustics , electrical engineering , physics , artificial intelligence , programming language , gibbs isotherm , chemical engineering , pulmonary surfactant , parallel computing
Speed up movement to increase productivity may cause problems such as vibration. The tool we propose to suppress vibration is based on input preshaping, and its visual graphical user interface makes it easy to use. Testing of the tool at high speed suppressing vibration in a semiconductor wafer transfer robot confirmed the feasibility of our proposal.
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