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1 State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, P.O. Box 912, Beijing 100083, PR China 2 School of Electronics, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China 3 College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China E-mail: yudeyu@semi.ac.cn

Development of an Electrochemical Sensor for Chloride ion Detection Using Ion-Sensitive Field-Effect Transistor Array