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Vertically aligned carbon nanotubes (VACNTs) were successfully grown onto stainless steel sheet (SUS) substrate at 750 °C by thermal chemical vapor deposition (TCVD) technique and were used as an electrode of the electric double-layer capacitor (EDLC). To grow VACNTs/SUS, Al (20 nm) was used as a buffer layer and Fe (5 nm) as a catalyst layer. To enhance the EDLC capacity, rutile phase of TiO2 nanoparticles were deposited onto VACNTs by using radio-frequency magnetron sputtering technique with a target of TiO2 in argon atmosphere without heating substrate. The as-prepared VACNTs/SUS and TiO2/VACNTs/SUS were characterized with scanning electron microscopy (SEM), energy dispersive spectroscopy (EDS), transmission electron microscopy (TEM), Raman spectroscopy and X-ray diffraction (XRD). The carbon nanotubes are found randomly oriented and approximately perpendicular to the surface of the SUS substrate. Raman spectroscopy results revealed that the crystalline structure of TiO2 onto the surface of VACNTs was rutile. The electrochemical properties of EDLCs with VACNTs and TiO2/VACNT composite electrodes were evaluated by cyclic voltammetry (CV) and galvanostatic charge-discharge using a three-electrode configuration system in 0.1 M KOH aqueous electrolyte solution at room temperature. The electrochemical measurements of electrode materials confirmed that the composition of TiO2/VACNTs/SUS exhibited much higher specific capacitance (1289 F/g) compared to the pure VANCTs/SUS (606) at a scan rate of 0.01 V/s. These results indicate that the VACNTs/SUS and TiO2/VACNT/SUS could be a candidate for advanced nanotechnology and electrochemical doublelayer capacitor (EDLC) applications.

Electrochemical Capacitive Characteristics of TiO2 Coated on Vertically Aligned Carbon Nanotubes