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1 School of Material Science & Engineering, Research Institute for Energy Equipment Materials, Hebei University of Technology, Tianjin 300130, China 2 Tianjin Key Laboratory of Materials Laminating Fabrication and Interface Control Technology, Hebei University of Technology, Tianjin 300130, China 3 Synergy Innovation Institute of GDUT, Heyuan, Guangdong Province, China 4 Peter the Great Saint-Petersburg Polytechnic University, Saint-Petersburg, 195221, Russia * E-mail: liangcy_hebut@outlook.com

international journal of electrochemical science

Structure and Electrochemical Properties of Hierarchically Porous Silicon Film Prepared with the Combination of Magnetron Sputtering Deposition and Metal-Assisted Chemical Etching