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The ZnO:Cu thin films with different concentrations of copper were obtained by RFmagnetron sputtering technique. Influence of copper concentration on the sensors properties of zinc oxide thin films, such as sensitivity and response time, has been examined for analysis of ethyl alcohol vapor, ammonia and acetone.

ENGINEERING OF THE SENSITIVE ELEMENTS FOR THE SENSORS OF ETHANOL VAPOR, AMMONIA AND ACETONE BASED ON ZnO:Cu ТHIN FILMS